Abstract
A new type of semiconductor position sensitive device called R-HPSD (Riken Hybrid Type Position Sensitive Device) has been invented. The relative resolution of image position sensing can be increased more than several ten times higher than that of conventional type PSD even though using the conventional circuit technology and without any serious sacrifice in simplicity of instrumentation and detecting speed. In addition, the image position detecting resolution can be changed adaptively by selecting suitable output terminal pair. Then the rough detection in wide range and precise detection in narrower range can be realized very easily with the same detecting element. Several prototypes have been manufactured based on the R-HPSD scheme and multi-resolution sensing capability has been proved by measuring image position sensing characteristics of them. This multi-resolution sensing capability is expected to apply for realizing new types of sensing system required in automation system such as robotics. For instance, it is expected to be used as a sensing element for introducing hierarchial sensing mode such as monitoring mode and attentive or intentional sensing mode.
