Abstract
We propose a novel range finder composed of a point light source and a photodetector both of which are placed on a micro vibrator. The photodetector senses the reflected light intensity from the object surface and the amplitude of its fluctuation by the vibration. The distance is evaluated from the ratio of those two measured values. It is applicable to both a scattering surface and a mirror-like one, and it is stable against the dirt and the sensitivity fluctuation of the detector. Its expected applications range from medical treatment to new type of computer interface, such as a proximity sensor in minimally invasive surgery and a tongue motion sensor. The principle and experimental results using a prototype sensor are shown.