SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section B
Nondestructive Depth Analysis of AlCrN Thin Films using Micro Beam X-ray Diffraction with Patterned Slits
Aya Hino, Amane Kitahara, Kazushi Hayashi
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Keywords: 2021B5021, 2022A5020, BL16XU
JOURNAL OPEN ACCESS

2023 Volume 11 Issue 4 Pages 274-278

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Abstract
[in Japanese]
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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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