SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section B
Evaluation of Dislocations in Heavily-doped Silicon Crystal Necking Parts by Super-Bormann Method
Tomoyuki HorikawaShingo NarimatsuYoshiyuki TsusakaJunji Matsui
Author information
Keywords: 2019B3265, BL24XU
JOURNAL OPEN ACCESS

2025 Volume 13 Issue 2 Pages 79-81

Details
Abstract
[in Japanese]
Content from these authors

この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
Previous article Next article
feedback
Top