SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section B
Soft X-ray Photoelectron Spectroscopy of the SiO2 ⁄ 4H-SiC Interface after Nitridation Process
Osamu Ishiyama, Hirotaka Yamaguchi
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Keywords: SXPES, SiC, 2011B1285, BL27SU
JOURNAL OPEN ACCESS

2015 Volume 3 Issue 2 Pages 385-387

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[in Japanese]
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