SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section B
Local Structural Analysis of Amorphous In-Ga-Zn-O Thin Films by Total Reflection Fluorescence X-ray Absorption Fine Structure Technique
Satoshi Yasuno, Masayuki Inaba, Shuji Kosaka
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Keywords: a-IGZO, X線吸収微細構造, 2013B1552, BL14B2
JOURNAL OPEN ACCESS

2016 Volume 4 Issue 2 Pages 268-271

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[in Japanese]
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