SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section A
HAXPES Study of Multilayer Oxidation Films on Si(100)
Cho-ying LinDeng-Sung Lin
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JOURNAL OPEN ACCESS

2018 Volume 6 Issue 2 Pages 190-193

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Abstract
We have carried out hard X-ray photoemission spectroscopy (HAXPES) measurement of the multilayer oxides on the Si(100) surface. Despite of many difficulties, we were able to acquire some data which provides us some further understanding of these buried oxide layers.
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