SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section A
Structural Analysis of Niobium Oxide Amorphous Films with Different O/Nb Prepared by Sputtering Method with Changing Oxygen Partial Pressure
Go SajikiTakashi InoueHiroshi Okano
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JOURNAL OPEN ACCESS

2021 Volume 9 Issue 5 Pages 278-282

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[in Japanese]
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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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