同時焼成法による厚膜無機 EL 素子の作製

抄録

In order to determine the optimum fabrication condition of inorganic electroluminescence device by co-firing of multilayers consisted of phosphor ((Ca_0.6Sr_0.4)_0.997Pr_0.002)TiO₃, dielectric materials BaTiO₃, transparent electrode ITO and back electrode AgPd, sintering behavior of the layers and changes of chemical composition and electro-properties were investigated during calcination and co-firing. It was developed that the calcination temperature above 900℃ was appropriate for the phosphor to suppress the crack and delamination caused by gas evolution and expansion during co-firing. Addition of phosphor material to BaTiO₃ layer was an effective method to obtain the desired sintering behavior and electro-characteristics. The sintering behavior of BaTiO₃ layer could be matched with that of phosphor layer, and dielectric constant was improved rather than BaTiO₃ alone when BaTiO₃ was mixed with phosphor with the volume ratio of 80 : 20. By co-firing at the temperatures of 800℃ and 1100℃, the inorganic electro-luminescence device with the radiation of red light could be prepared.