2025 年 62 巻 4 号 p. 224-229
This article explores the innovative application of the traditional Japanese “Seigaiha” (blue ocean wave) pattern to nanoscale silicon structures for thermal management in semiconductor devices. We investigate the anisotropic in-plane thermal conduction in silicon thin films with nanoscale Seigaiha patterns using micro time-domain thermoreflectance measurements across a wide temperature range (4–300 K). Our findings reveal a remarkable reversal of thermal conductivity anisotropy below 80 K, attributed to the transition from diffusive to quasi-ballistic phonon transport regimes. Monte Carlo simulations elucidate the underlying mechanisms, demonstrating how the unique geometry of the Seigaiha pattern influences phonon propagation and creates thermally dead volumes. This research not only advances our understanding of nanoscale heat transport but also showcases the potential of integrating cultural design elements with cutting-edge nanotechnology. The results provide valuable insights for directional heat dissipation in electronic devices and open new avenues for thermal management strategies in semiconductor technology.
