Roll-to-roll vacuum deposition of barrier layers and electrodes for flexible OLEDs

Abstract

Roll-to-roll (R2R) vacuum deposition technologies of barrier layers and electrodes on flexible substrates were developed, aiming at the application to flexible organic light emitting diodes (OLEDs). In this development, we found several new issues which have not been observed in the case of normal rigid glass substrates. This study reviews the observed issues and the solving technologies. Flexible OLED devices were also fabricated using the developed technologies in this study.