Abstract of annual meeting of the Surface Science of Japan
The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
Session ID : 4Ba-04
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Host: the Vacuum Society of Japan and the Surface Science Society of Japan

November4
Plasma diagnostic in high power impulse magnetron sputtering with modified target voltage during pulse-off period
*Norihiko Hirukawa, Takeo Nakano, Sigeru Baba
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[in Japanese]

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© 2010 The Surface Science Society of Japan/the Vacuum Society of Japan
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Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science

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