The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
Session ID : 4Ba-05
Conference information
Host:
the Vacuum Society of Japan and the Surface Science Society of Japan
analysis of c-c5f8 plasma with two-dimensional fluid simulation using a quantum chemistry calculation