Abstract of annual meeting of the Surface Science of Japan
2015 International Joint Symposium on Recent Progress of Advanced Nanocharacterization
Session ID : 1P05V
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Host: The Surface Science Society of Japan, The Vacuum Society of Japan

december1
Pressure and Material Dependability of Target Race Track Profile during Magnetron Sputtering 2
*Yudai Saito, Ryuhei Kamata, Takeo Nakano
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[in Japanese]

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© 2015 The Surface Science Society of Japan
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