主催: 公益社団法人日本表面科学j会
会議名: 2016年真空・表面科学合同講演会
開催地: 名古屋国際会議場
開催日: 2016/11/29 - 2016/12/01
Micro-Raman spectroscopy technique is a powerful method to characterize the mechanical properties of materials. It has some advantages, such as non-destructive, rapid and high spatial resolution. The change of lattice (such as deformation, defects, phase transition) affect the lattice vibrations, and cause the peak shift of Raman spectrum. In our research, a distribution of residual stresses at different depths can be realized by the Raman peak shift.