多元系化合物・太陽電池研究会 年末講演会論文集
Online ISSN : 2758-2302
2018
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PLD法CuInS2薄膜のSアニール温度による異相の変化
島田 新大沈 用球脇田 和樹
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p. 19-22

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Sulfur anneal treatment of CuInS2 films deposited by PLD method was carried out. For S anneal treatment, the composition ratio of S was performed to be more 50% and the crystal grain size became larger. In addition, it was confirmed that different phases such as Cu2S which were observed on as-deposited films, disappeared by anneal treatment with temperatures more than 550 ℃.

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