主催: 公益社団法人 応用物理学会 多元系化合物・太陽電池研究会
会議名: 平成30年度 応用物理学会 多元系化合物・太陽電池研究会 年末講演会
開催地: 東京理科大学 神楽坂キャンパス
開催日: 2018/11/30 - 2018/12/01
p. 19-22
Sulfur anneal treatment of CuInS2 films deposited by PLD method was carried out. For S anneal treatment, the composition ratio of S was performed to be more 50% and the crystal grain size became larger. In addition, it was confirmed that different phases such as Cu2S which were observed on as-deposited films, disappeared by anneal treatment with temperatures more than 550 ℃.