抄録
We used the anomalous dispersion effect and a Fourier transformation method for analysis of X-ray reflectivity without using theoretical layer models. The reflectivity of a layer stack was measured at two x-ray wavelengths, the near Ru-K edge and pre Ru-K edge, for a sample with a 0.8 nm thick Ru layer at the stack top. We calculated the differential reflectivity between the two wavelengths by subtracting the near Ru-K edge curve from that of the pre Ru-K edge. The result of fast Fourier transformation (FFT) performed on the differential curve showed interface depths from the sample surface to the interface. This result suggests the promising candidate for analyzing the layer structure of a sample by using the anomalous dispersion effect and FFT methods.
