抄録
Transport of nano-particles in amplitude modulated (AM) RF discharges has been investigated using two-dimensional laser-light-scattering (2DLLS) method. By using the modulation, nano-particles can be transported rapidly, at a velocity more than 60 cm/s, from their generation region towards the upper grounded electrode during the modulation period. Two key parameters for the rapid transport are the discharge voltage VAM and the period delta t of the modulation. The rapid transport is realized for delta t longer than a threshold delta t value and VAM larger than a threshold VAM value. The threshold delta t value increases with the discharging period Ton, that is the size of nano-particles.
