抄録
We have tried modification of Y3Fe3O12 nanoparticle films in high-density RF plasmas sustained at high operating gas pressure. Experiments for pure Ar plasma showed phase separation which occurred by oxygen deficiency and no phase transformation to YIG. Modification by adding Ar gas to oxygen gas results in significant structure change. These results suggest that the plasma sustained for Ar+O2 mixture gas have enough enthalpy for phase transformation. The addition of oxygen in Ar plasmas is effective for suppression of phase separation and enhancement of phase transformation to YlG. Rate of phase transformation in high-density plasma is fast compared to that in conventional annealing using electric furnace which requires for 30 min at 900 °C to transform to YIG.
