Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
Advanced Materials and Technologies
Development and diagnostics of novel materials processing using supercritical fluid plasma generated by space- and time-restricted discharge
Takaaki TomaiHirokazu KikuchiSho NakaharaHiroharu YuiKazuo Terashima
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2008 年 33 巻 2 号 p. 355-358

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Plasma generated in supercritical fluid (SCF) is anticipated to yield a unique reactive field due to a combination of the high reactivity of plasma and the superior transport properties and density fluctuation of SCF. To effectively use the unique characteristics of SCF, it is important to prevent an increase in gas temperature, which degrades the unique characteristics of SCF. The space and time restrictions of the plasma have been the typical methods for keeping the gas temperature of the plasma generated in a high-pressure environment low. In our previous study, it was found that a reduction in plasma size contributes markedly to the appearance of the novel phenomenon of discharge generated in SCF. In this work, using pulsed DC voltage, we generated time-restricted discharge plasmas in supercritical CO2 and discuss the effect of the time restriction of the plasma generation by pulse technology on the SCF plasma and SCF plasma processing. Moreover, using nanosecond-order pulsed DC voltage, we successfully fabricated carbon nanomaterials, such as carbon nanotubes (CNTs), from CO2, without the electrode being seriously damaged by the discharge plasma in a supercritical CO2 environment.
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© 2008 The Materials Research Society of Japan
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