抄録
We have succeeded in synthesizing the silicon carbide (SiC) nano fibers from Si-based polymers using Single Particle Nanofabrication Technique (SPNT). Si-based polymers were cross-linked by MeV-order heavy-ion beam irradiation along ion tracks of nano-size in radius through the whole thickness of the polymer thin film. Nano fibers were developed on the surface of the substrate by dissolution and washing away of un-crosslinked polymer by solvent. Subsequent pyrolysis converted polymeric into inorganic SiC nano fibers. The radius of nano fibers was depended on LET (liner energy transfer), molecular weight, and cross-linking efficiency of the precursor polymers.
