Effect of Hydrogen Radical Treatment and Synthesis of Sn-Catalyzed Silicon Nanowires at Various Growth Conditions

抄録

Tin-catalyzed silicon nanowires (SiNWs) are synthesized using the hydrogen radical-assisted deposition method. Numerous metal nanoparticles are fabricated after hydrogen radical pretreatment from metal thin film. Large quantities of SiNWs after formation of metal catalysts are synthesized at various growth conditions, such as varied nanoparticle sizes, growth times and temperatures. Their diameters and lengths depend on the growth time and size of nanoparticles. Voluminous whisker-like crystallized SiNWs are obtained at temperatures above 350°C. [DOI: 10.1380/ejssnt.2009.708]