抄録
We have investigated the relationship among thermal properties and mechanical properties of the amorphous carbon films containing nitrogen prepared by the RFplasma enhanced CVD. Thermal conductivity was measured by the 3 w method and related with In!I0 from the Raman spectroscopy, N/C and density from the RBS/ERDA and hardness from the nanoindentation method. The thermal conduction in the films was discussed in terms of the graphite cluster size La derived from the Inllo and correlated with the mechanical properties and tribological properties.
