Preparation of magnetite thin film using one-liquid ultrasonic spray plating

抄録

Magnetite (Fe3O4) thin film was prepared by one-liquid ultrasonic spray plating using an aqueous solution containing FeCl2, NaNO2 and dextran. The starting solution was atomized into mist using an ultrasonic nebulizer and the mist was carried on to a substrate. Using this method, Fe3O4 film was deposited at 90°C; however, NaCl was coexisted with the film and the crystallinity and magnetic property of the film was low. After post deposition annealing at 850oC in N2, NaCl was evaporated, and crystallinity and magnetic property of the film was improved. The mechanism and property of the film was compared with spin spray plating method invented by Abe et al.