Electron Charged States of Pt-silicide Nanodots as Evaluated by Using an AFM/Kelvin Probe Technique

抄録

We formed high density platinum-silicide nanodots on an ultrathin SiO₂ layer and characterized their electronic charged states by an AFM/Kelvin probe technique. A ～1.8-nm-thick Pt film deposited on pre-grown Si quantum dots (Si-QDs) with an areal dot density of ～1.2 × 10¹¹ cm^–2 was exposed to remote hydrogen plasma. The formation of platinum-silicide nanodots with an areal dot density of ～1.2 × 10¹¹ cm^–2 was confirmed after examining the surface morphology and measuring the valence band spectra by AFM and XPS, respectively. The surface potential of the nanodots changed in a stepwise manner with respect to the tip bias due to multistep electron injection into and extraction from the platinum-silicide nanodots.