Abstract
Preparation condition of SrS:Cu thin film electroluminescent element (EL) elements was investigated to improve blue-EL-emission properties. The sintering temperature and time were fixed at 600℃ and 1h, respectively. The Cu2S concentration of 0.5 mol% was used. The effect of the thickness of SrS:Cu emission layer on the crystallinity of EL elements was investigated. The best crystallinity was obtained under the thickness and deposition time of 18000Å and 3h, respectively. A rapid thermal annealing (RTA) process at 700℃ was also effective to improve crystallinity of EL elements. This RTA process was better than the normal annealing process at 450℃, 2min. From a dynamic force measurement (DFM), The surface roughness of EL elements was smallest after the RTA annealing at 700℃, 2 min.
