Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
Regular Papers
Dissociative Excitation Process of BrCN in the ECR Plasmas of Rare Gases
Haruhiko ItoHiroki Hayashi
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2011 年 36 巻 3 号 p. 499-504

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The dissociative excitation reaction of BrCN with the electron-cyclotron resonance plasma flows of He, Ne, Ar, and Kr was studied based on the electrostatic-probe measurements and on the optical emission spectra of the B2Σ+−X2Σ+ transition of CN radicals. The electron-energy distributions and the CN(B2Σ+−X2Σ+) emission intensity were dependent on the addition of H2O molecules externally into the reaction region. Based on a kinetic analysis, the mechanism of dissociation of BrCN was found, predominantly, to be the electron impact, BrCN+e→Br+CN(B2Σ+)+e, in the cases of Ne, Ar, and Kr, whereas dissociation proceeds via the ion-electron recombination, BrCN++e→Br+CN(B2Σ+), in the case of He. The difference of the dissociation mechanism is interpreted in terms of the rate constants for the relevant processes.
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© 2011 The Materials Research Society of Japan
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