Influence of Film Density on Adhesions of HD-DLC Films Prepared by FAD System

抄録

In this study, the high density diamond-like carbon (HD-DLC) with hydrogen-free was developed using filtered-arc-deposition (FAD) system. Mechanical properties of HD-DLC were evaluated. Relationship between film density and the adhesive strength from scratch test was discussed.
It was found that the hardness is 80–90 GPa, the wear coefficient of HD-DLC is 0.1. The amount of losses of energy decreased at about 50%. Obtained the value of density of HD-DLC film is 3.4 g/cm³, which is 1.5 times than conventional DLC films. Furthermore, the adhesion strength of HD-DLC improved with increase of film density under bias voltage.