Color Filter Based on Surface Plasmon Resonance Utilizing Sub-Micron Periodic Hole Array in Aluminum Thin Film

Naoki IKEDA; Yoshimasa SUGIMOTO; Masayuki OCHIAI; Daijyu TSUYA; Yasuo KOIDE; Daisuke INOUE; Atsushi MIURA; Tsuyoshi NOMURA; Hisayoshi FUJIKAWA; Kazuo SATO

doi:10.1587/transele.E95.C.251

Special Section on Photonic Devices using Nanofabrication Technology and Their Applications

Color Filter Based on Surface Plasmon Resonance Utilizing Sub-Micron Periodic Hole Array in Aluminum Thin Film

Naoki IKEDA, Yoshimasa SUGIMOTO, Masayuki OCHIAI, Daijyu TSUYA, Yasuo KOIDE, Daisuke INOUE, Atsushi MIURA, Tsuyoshi NOMURA, Hisayoshi FUJIKAWA, Kazuo SATO

著者情報

Naoki IKEDA
National Institute for Materials Science
Yoshimasa SUGIMOTO
National Institute for Materials Science
Masayuki OCHIAI
National Institute for Materials Science
Daijyu TSUYA
National Institute for Materials Science
Yasuo KOIDE
National Institute for Materials Science
Daisuke INOUE
Toyota Central Research & Development Laboratories Inc.
Atsushi MIURA
Toyota Central Research & Development Laboratories Inc.
Tsuyoshi NOMURA
Toyota Central Research & Development Laboratories Inc.
Hisayoshi FUJIKAWA
Toyota Central Research & Development Laboratories Inc.
Kazuo SATO
Toyota Central Research & Development Laboratories Inc.

キーワード: surface plasmon resonance, aluminum, color filter, electron beam lithography, reactive ion etching

ジャーナル認証あり

2012 年 E95.C 巻 2 号 p. 251-254

DOI https://doi.org/10.1587/transele.E95.C.251

詳細

抄録

We investigated optical transmission characteristics of aluminum thin films with periodic hole arrays in sub-wavelength. We divided white light into several color spectra using a color filter based on the surface plasmon resonance (SPR) utilizing aluminum showing high plasma frequency. By optimizing a hole-array period, hole shape, polarization and index difference of two surface, transmittance of 30% and full-width at half-maximum of around 100nm were achieved.

責任著者(Corresponding author)

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