Al-Based Metal Mesh Electrodes for Advanced Touch Screen Panels Using Aluminum Nitride System Optical Absorption Layer

抄録

An Al-N system optical absorption layer has been developed, to be used for Al-based metal mesh electrodes on touch screen panels. The triple-layered electrode effectively suppresses the optical reflection in both visible light and the blue color region and exhibits excellent wet etching property that accommodates micro-fabrication. Due to its high noise immunity and contact sensitivity originating from its low electrical resistivity, the proposed metal mesh electrodes are useful for touch-sensitive panels in the next generation ultra-high-resolution displays.