Design and Fabrication of PTFE Substrate-Integrated Waveguide Butler Matrix for Short Millimeter Waves

Mitsuyoshi KISHIHARA; Kaito FUJITANI; Akinobu YAMAGUCHI; Yuichi UTSUMI; Isao OHTA

doi:10.1587/transele.2022ECS6003

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Design and Fabrication of PTFE Substrate-Integrated Waveguide Butler Matrix for Short Millimeter Waves

Mitsuyoshi KISHIHARA, Kaito FUJITANI, Akinobu YAMAGUCHI, Yuichi UTSUMI, Isao OHTA

著者情報

キーワード: microstructure, X-ray lithography, dielectric loaded waveguides, Butler matrix, millimeter wave circuits

ジャーナルフリー早期公開

論文ID: 2022ECS6003

DOI https://doi.org/10.1587/transele.2022ECS6003

この記事には本公開記事があります。

The final version of this article is now available: Vol. E106.C (2023), No. 3 pp. 111-115

詳細

抄録

We attempt to design and fabricate of a 4×4 Butler matrix for short-millimeter-wave frequencies by using the microfabrication process for a polytetrafluoroethylene (PTFE) substrate-integrated waveguide (SIW) by the synchrotron radiation (SR) direct etching of PTFE and the addition of a metal film by sputter deposition. First, the dimensions of the PTFE SIW using rectangular through-holes for G-band (140-220 GHz) operation are determined, and a cruciform 90° hybrid coupler and an intersection circuit are connected by the PTFE SIW to design the Butler matrix. Then, a trial fabrication is performed. Finally, the validity of the design result and the fabrication process is verified by measuring the radiation pattern.

責任著者(Corresponding author)

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