Broadband width edge coupler structure for SiN-Si heterogeneous integration

抄録

We study how to optimize the coupling efficiency between silicon nitride and silicon waveguides using an edge coupler with an inverse-tapered structure, specifically targeting broad bandwidth applications. Initially, we hypothesized that mode matching alone would suffice for effective coupling. However, our results indicate that maximizing the coupling efficiency requires the simultaneous optimization of mode coupling and effective refractive-index matching. Theoretical simulations predicted a maximum coupling efficiency of 0.963, while experimental measurements yielded an efficiency of 0.588. We analyzed the wavelength dependence of our coupler, and found that the edge coupler exhibited broader bandwidth properties than a standard multilayer coupler, making it more suitable for applications across a wide wavelength range. These results indicate the potential for integrating such couplers with microresonator frequency comb systems, offering the possibility of a wide range of photonic applications.