レーザ測長機を用いた高精度ロール測定装置の開発（多点反射による感度向上）

抄録

Almost all geometric deviations that occur on a machine tool can be detected most precisely with the laser measurement system. However, the roll cannot be detected yet since the interferometer for it is not present. The purpose of the study is to propose a practical laser measurement method of the roll on a machine tool, and to confirm an efficiency of the method. The developed system consists of an interferometer and a V-shaped reflector. The interferometer is mainly composed of a corner cube prism, a polarized beam splitter, three quarter wave plates, and a bi-prism. In order to increase the amount of change of the laser path length with respect to the change of the roll, retroreflective prisms are attached to the rear side of the interferometer. The sensitivity and the dispersion of roll measurement data are improved by increasing number of the retroreflection. The developed system and a conventional roll measurement system which uses a long-sized plane mirror are mounted on a machining center, and measurements of the roll are pursued simultaneously. The data obtained by the developed system show the same tendency as method using the long-sized plane mirror. From the results, the availability of the developed system to detect the roll that occurs in a comparatively long travel, about 1m, is confirmed.