2019 年 85 巻 873 号 p. 18-00461
A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorate measurement accuracy. This study focuses on removing the vibration of low frequencies because conventional vibration isolation devices for cryopump can hardly remove them. In the developed vibration isolation device, an active vibration absorber is used to remove the vibration efficiently at low frequencies. The controller is designed based on the internal model principle. The pole assignment is used to tune the controller. The efficacy of the designed and tuned controller is demonstrated in the developed apparatus.
