日本機械学会論文集
Online ISSN : 2187-9761
ISSN-L : 2187-9761
生産加工・工作機械の規範2018
ベッセルビームの光放射圧ポテンシャルを用いたマイクロスケールAdditive Manufacturingの加工原理検証
道畑 正岐林 政洋代慶 真高増 潔高橋 哲
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2019 年 85 巻 880 号 p. 19-00244

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Manufacturing technology for three-dimensional nano/micro-structures has been desired. In this study, we newly proposed the laser additive manufacturing method in vapor phase, by utilizing optical trapping potential to confine particles in a range smaller than diffraction limit of laser beam. In this paper, we have developed the optical trapping system with Bessel beam in order to investigate feasibility of the proposed fabrication methods. The water droplet of several µm in diameter containing particles suspended in space were successfully trapped in the optical potential of Bessel beam and then the only particles were deposited on the substrate. As a result of processing experiment, the silica particles with a diameter of 1 µm could be three dimensionally structured on the axis of the Bessel beam.

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