抄録
This paper describes the elucidation about the influence of NaCl electrolyzed oxidizing water (It abbreviates as EO water) on the surface of kovar alloy (Fe-29.72wt%Ni-16.28wt%Co). First, the etching characteristic of NaCl EO water against the surface of kovar alloy was clarified using chemicals for comparative immersion experiments. The comparative study showed that as for the etching efficiency on the surface of kovar alloy, NaCl EO water was superior, and the selective etching tendency is weak to HCl solution. Next, by the observation using SEM image, the influence of NaCl EO water on the surface shape of kovar alloy was clarified. The results indicated that when using NaCl EO water, the test pieces surface of only polishing becomes smooth but in the test pieces surface of heating processing, the small pit occurs. Lastly, as for the test pieces after heating processing, it did the surface oxidation layer removal experiment by the immersion. The results show that NaCl EO water can remove the surface oxidation layer like HCl solution approximately. However, the surface oxidation layer which is thin newly is formed in the surface which was processed with NaCl EO water. By this study, we got the suggestion that NaCl EO water can be applied to the surface treatment such as the etching of kovar alloy.