鉄粉層内蔵ばね型アクチュエータを用いたリニア平面位置制御機構の開発

抄録

A high speed actuator consisting of coil springs with iron particle layers was developed. In this system, the move of actuator head is controlled by electromagnets. Using this newly developed actuator, the two dimensional position control mechanism that controls the position of the instruction point on the screen by changing the angle of the laser pointer is introduced. The mechanism consists of two spring actuators, sliders, and a laser pointer. One actuator is parallel to X- axis and the other to Y-axis, and the laser pointer is rotated by flexing the springs. The head displacement in X-direction is independent of Y-direction. Therefore, the instruction point can be scanned all over the range by operating the one actuator with high frequency and the other with low frequency. Moreover, the instruction point moves to the target point by using usual PID control method.