半導体製造装置における磁性流体シール技術の動向

抄録

With the spread of IoT, various semiconductor electronic components are produced, and the semiconductor manufacturing process becomes more complicated. Magnetic fluid seals are important as sealing devices used in semiconductor manufacturing equipment to cope with such processes. In particular, the use of a fluorine-based oil-magnetic fluid having excellent heat resistance makes it possible to manufacture semiconductors in more diverse and severe processes, and it is expected that the maintenance cost can be reduced and the throughput can be increased by prolonging the life of the seal. In the future, if the operating temperature range of magnetic fluid becomes wider, it is expected that the applications will increase in the field of electric vehicle, aerospace, energy, etc.