抄録
Considering the thin film transistors (TFT's) in the present applications In active matrix liquid crystal displays (AMILCD), the effects of the interface states and the fixed charges at both the rear and front interfaces, i.e., the semiconductor surface apart from and on the gate insulator, respectively, for the thin hydrogenated amorphous silicon (α-Si:H) films have been studied. It is found that the rear interface fixed charges and states will predominantly influence the electrical characteristics of the TFT's as much as the front interface ones do if the semiconductor films are thin enough.
