Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Issue : Maintenance for Vacuum Equipment and Components
Review of Leak Test for Vacuum Equipment Maintenance
Akio IGAWATakaharu NISHIHARA
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2018 Volume 61 Issue 8 Pages 505-509

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Abstract

The helium leak test method that is the highest sensitivity among various types of leak tests is reviewed on the application for a vacuum equipment maintenance. The notes and important things on each test condition are explained from the application example.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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