特集「真空機器メンテナンス講座」
真空装置のメンテナンス リークテストの解説
2018 年 61 巻 8 号 p. 505-509
詳細
2018 年 61 巻 8 号 p. 505-509
The helium leak test method that is the highest sensitivity among various types of leak tests is reviewed on the application for a vacuum equipment maintenance. The notes and important things on each test condition are explained from the application example.
