光電子分光法による搬送可能な超高真空チャンバー内での金属表面の汚染の評価

抄録

We have carried out a photoelectron spectroscopy investigation of surface contamination on an aluminum film following transportation using a portable ultrahigh-vacuum transfer vessel. It was found that oxygen contamination was confined to about one atomic layer, and both hydroxylation and adsorption of carbon oxide were effectively suppressed. Although a hydrocarbon signal was detected, this originated from residual gas in the experimental equipment.