ナノインプリントによる機能性構造作製の歩みとこれからの展開

平井 義彦

doi:10.1380/vss.63.566

Vacuum and Surface Science

Online ISSN : 2433-5843
Print ISSN : 2433-5835

Special Feature : Perspective of Micro and Nano Fabrication Technology -Structural Color, Nanoimprint Lithography, Stereolithography-

Overviews and Outlook of Functional Surface Fabrication by Nanoimprint Technology

Yoshihiko HIRAI

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Keywords: nanoimprint, sub wavelength, hybrid nanoimprint, reversal nanoimprint, biomimetics

JOURNAL FREE ACCESS

2020 Volume 63 Issue 11 Pages 566-573

DOI https://doi.org/10.1380/vss.63.566

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Abstract

Progress of novel fabrications for functional surfaces using various shapes and materials are introduced such as subwavelength optics, biomimetic, electric devices, related to capability of advanced nanoimprint technology

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja

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