電子回折顕微法の開発

抄録

In this article, the development of a new nano/atomic-scale imaging method based on electron diffraction intensity is introduced. The method is based on the technique called diffractive imaging, in which the sample structure is reconstructed from its diffraction intensity through iterative calculations. As a result of the developments of specific experimental setups and reconstruction algorithms suitable for transmission electron microscopes (TEM), the phase imaging across the field of view of 100 nm and the atomic-resolution imaging superior to the aberration-corrected TEM imaging have been achieved.