Special Feature : The Division of Microbeam Analysis
Database for Auger and Secondary Electron Spectra Based on Absolute Measurements
2021 Volume 64 Issue 10 Pages 476-481
Details
2021 Volume 64 Issue 10 Pages 476-481
The Division of Microbeam Analysis, the Japan Society of Vacuum and Surface Science, publishes the Database for Auger and Secondary Electron Spectra online (https://www.jvss.jp/division/mba/sedb/). These spectral data were measured with an SI traceable cylindrical mirror analyzer developed by Keisuke Goto (absolute measurement system). The database body stores measurement data and spectra of 56 materials and 47 materials as an appendix. This paper reports the concept and characteristics of the absolute measurement system and introduces the electron spectra database.
