X線光電子分光における時空間計測/解析技術の開発～NAP-HARPESから4D-XPSへ～

豊田 智史; 山本 知樹; 吉村 真史; 住田 弘祐; 三根生 晋; 町田 雅武; 吉越 章隆; 鈴木 哲; 横山 和司; 大橋 雄二; 黒澤 俊介; 鎌田 圭; 佐藤 浩樹; 山路 晃広; 吉野 将生; 花田 貴; 横田 有為; 吉川 彰

doi:10.1380/vss.64.86

Special Feature : Heterogeneous Material Integrated Semiconductor Device for Society 5.0

Development of Spatiotemporal Measurement and Analysis Techniques in X-ray Photoelectron Spectroscopy ∼From NAP-HARPES to 4D-XPS∼

Satoshi TOYODA , Tomoki YAMAMOTO, Masashi YOSHIMURA, Hirosuke SUMIDA, Susumu MINEOI, Masatake MACHIDA, Akitaka YOSHIGOE, Satoru SUZUKI, Kazushi YOKOYAMA, Yuji OHASHI, Shunsuke KUROSAWA, Kei KAMADA, Hiroki SATO, Akihiro YAMAJI, Masao YOSHINO, Takashi HANADA, Yuui YOKOTA, Akira YOSHIKAWA

Author information

Satoshi TOYODA Corresponding author
New Industry Creation Hatchery Center, Tohoku University
Tomoki YAMAMOTO
Synchrotron Radiation Nanotechnology Center, University of Hyogo
Masashi YOSHIMURA
SPring-8 Service Co., Ltd.
Hirosuke SUMIDA
Technical Research Center, Mazda Motor Corporation
Susumu MINEOI
Technical Research Center, Mazda Motor Corporation
Masatake MACHIDA
Scienta Omicron, Inc.
Akitaka YOSHIGOE
Japan Atomic Energy Agency
Satoru SUZUKI
Synchrotron Radiation Nanotechnology Center, University of Hyogo
Kazushi YOKOYAMA
Synchrotron Radiation Nanotechnology Center, University of Hyogo
Yuji OHASHI
New Industry Creation Hatchery Center, Tohoku University
Shunsuke KUROSAWA
New Industry Creation Hatchery Center, Tohoku University
Kei KAMADA
New Industry Creation Hatchery Center, Tohoku University
Hiroki SATO
New Industry Creation Hatchery Center, Tohoku University
Akihiro YAMAJI
New Industry Creation Hatchery Center, Tohoku University
Masao YOSHINO
Institute for Materials Research, Tohoku University
Takashi HANADA
Institute for Materials Research, Tohoku University
Yuui YOKOTA
Institute for Materials Research, Tohoku University
Akira YOSHIKAWA
New Industry Creation Hatchery Center, Tohoku University
Institute for Materials Research, Tohoku University

Keywords: x-ray photoelectron spectroscopy, NAP-HARPES, 4D-XPS, sparse modeling, Jackknife MEM

JOURNAL FREE ACCESS

2021 Volume 64 Issue 2 Pages 86-91

DOI https://doi.org/10.1380/vss.64.86

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Abstract

We have developed spatiotemporal measurement and analysis techniques in x-ray photoelectron spectroscopy. To begin with, time-division depth profiles of gate stacked film interfaces have been achieved by NAP-HARPES (Near Ambient Pressure Hard x-ray Angle-Resolved PhotoEmission Spectroscopy) data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division ARPES data, which enables us to realize 4D-XPS analysis. It is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling in NAP-HARPES data is effective to perform dynamic measurement of depth profiles with high precision.

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