2022 年 65 巻 11 号 p. 514-519
Nonevaporable getter (NEG) pumps are widely used in ultra-high vacuum (UHV) apparatus to evacuate residual gasses efficiently in UHV of 10–7 Pa or less. NEG pumps can be use in oil-free, noise-free, vibration-free, space-saving, energy-saving and low-cost. We have developed a new type of NEG pump, named oxygen-free Pd/Ti. A pumping speed of the Oxygen-free Pd/Ti did not decrease after repeated cycles of pumping, baking and air vent. The pumping speed of H2 and CO at room temperature were easily restored by baking at 406 K (133℃) for 12 hours. In this study, we have investigated the dependence of pumping performance and peeling resistance of ICF152 formed bellows with oxygen-free Pd/Ti deposited on stainless steel with surface finishing of 2B or Bright Anneal. We also conducted a test to confirm that peeling did not occur when the bellows was stretched and retracted.