Current Status and Future of Surface Analysis and Micro-beam Analysis in the Industrial Field

Abstract

In order to utilize data science such as artificial intelligence (AI) and materials informatics (MI) for measurement analysis data, it is necessary to use correct data. To do this, the sample must be handled correctly and cross-checked in a combined analysis. We will describe the combined measurement and analysis by the Cyber Physical System (CPS) for that purpose, and give an overview of the future of analysis technology aiming to create high-value-added data.