Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Development and Applications of Instrumentation, Measurements, and Data-analysis in Surface Analysis
Analysis of Surfaces and Interiors of Fine Particles Using FIB-TOF-SIMS
Tetsuo SAKAMOTO
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2022 Volume 65 Issue 3 Pages 115-120

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Abstract

Originally developed high-spatial focused ion beam secondary ion mass spectrometer (FIB-TOF-SIMS) is described. The FIB-TOF-SIMS has a unique function such as micro-cross-sectioning of small particles and analysis of interior of the particle. Three types of applications are explained. The first one is individual particle analysis of aerosol. Chemical reaction of yellow sands in air was revealed with the FIB-TOF-SIMS analysis. The second one is biological application. A 3D-culture (spheroid) sample was analyzed after cross-sectioning. The last one is application to decommissioning of the Fukushima-Daiichi power plant. The most important feature, isotope imaging without isobaric interference by means of resonance ionization using tunable Ti:Sapphire lasers integrated on the FIB-TOF-SIMS.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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