Special Feature : State-of-the-art Technology in Transmission Electron Microscopy
Low-dose Observation of Electron-beam Sensitive Materials Using STEM-OBF Method
2023 Volume 66 Issue 12 Pages 695-699
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2023 Volume 66 Issue 12 Pages 695-699
In recent years, scanning transmission electron microscopy (STEM) with aberration corrector has become widely popular due to its ability to achieve atomic resolution and analysis. On the other hand, observation of electron-beam-sensitive materials such as catalysts and lithium-ion batteries at atomic resolution is requested. The newly developed STEM-optimum Bright Field (OBF) imaging is effective for this purpose. This method enables high-sensitivity and high-contrast observation even under low-dose conditions. In this paper, we explain the principles and practical conditions of the STEM-OBF and introduce its application results to catalyst materials such as zeolites and Metal Organic Frameworks (MOF), lithium-ion battery materials, and semiconductor devices.
